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Photolithographic performance of a-As2S3 resists under synchrotron X-ray irradiation

✍ Scribed by Atanas Buroff; Antony D. Rush

Book ID: 119444200
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 836 KB
Volume: 90
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(87)80491-x

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