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Photolithographic fabrication of high frequency second sound detectors

✍ Scribed by G. Laguna


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
251 KB
Volume
16
Category
Article
ISSN
0011-2275

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## Abstract In this study, a new type of low temperature co‐fired ceramic (LTCC) probes fabricated using the system‐in‐package (SiP) technology is proposed; these probes are used for high‐frequency measurements. The advantage of LTCC probes is that suitable structures of the metal tips of their ele