✦ LIBER ✦
Photoinduced self-limited low-temperature growth of ultra-thin silicon-oxide films with water vapor
✍ Scribed by P. Patzner; A.V. Osipov; P. Hess
- Publisher
- Springer
- Year
- 2006
- Tongue
- English
- Weight
- 480 KB
- Volume
- 85
- Category
- Article
- ISSN
- 1432-0630
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