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Photoemission study of synchrotron radiation induced reactions of TEOS adsorbed on silicon surface

โœ Scribed by Michio Niwano; Nubuo Miyamoto; John K. Simons; Sean P. Frigo; Richard A. Rosenberg


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
399 KB
Volume
79-80
Category
Article
ISSN
0169-4332

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