✦ LIBER ✦
Photoemission studies of very thin (<10 nm) silicon oxynitride (SiOxNy) layers formed by PECVD
✍ Scribed by P. Hoffmann; D. Schmeißer; R.B. Beck; M. Cuch; M. Giedz; A. Jakubowski
- Book ID
- 116598075
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 286 KB
- Volume
- 382
- Category
- Article
- ISSN
- 0925-8388
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