Influence of oblique-angle sputtered tra
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Leem, Jung Woo ;Yu, Jae Su
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Article
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2011
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John Wiley and Sons
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English
β 615 KB
## Abstract The transparent conducting oxide (TCO) films with lowβrefractiveβindex (lowβ__n__) are fabricated by the obliqueβangle sputtering method. By using the experimentally measured physical data of the fabricated lowβ__n__ TCO films as the simulation parameters, the effect of lowβ__n__ TCOs o