✦ LIBER ✦
Photoelectrochemical etching to fabricate single-crystal SiC MEMS for harsh environments
✍ Scribed by Feng Zhao; Mohammad M. Islam; Chih-Fang Huang
- Book ID
- 113794036
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 666 KB
- Volume
- 65
- Category
- Article
- ISSN
- 0167-577X
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