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Photoactive polymers applied to advanced microelectronic devices

✍ Scribed by Katsuhiro Mizoguchi; Etsuo Hasegawa


Book ID
102660048
Publisher
John Wiley and Sons
Year
1996
Tongue
English
Weight
673 KB
Volume
7
Category
Article
ISSN
1042-7147

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✦ Synopsis


This paper describes recent results of research on organic materials, especially organic photopolymers for opto-electronic devices, which are contributing to the realization of the "Multimedia World" in the 21st century. For this purpose two photoactive polymers were developed for Gbit-scale dynamic random access memory ( D R A M ) chip fabrication and for liquid c ystal displays, respectively. For 1 Gbit DRAM fabrication mask, a novel and positive resist of the chemically amplified type was developed for ArF excimer laser lithography. It consists of new organic materials; an alicyclic methacylate terpolymer and a photoacid generator called NEALS. A 0.20 p m line-and-space pattern was formed using an ArF excimer laser exposure system (numerical aperture of 0.55) and an aqueous base developer. For a bright and low-energy consumption display, a new polymer (poly(diac yloyloxy diethylstilbene)) was developed for a polymer stabilized cholesteric textures film, which operates without a polarizer. The film with a chlorine liquid cystal mixture shows good electro-optic properties, such as low driving voltage ( V ~O of 9.2 V ) , large charge holding ratio (92%), low width of hysteresis (0.4 V ) and contrast ratio of 20, which demonstrate its potential for use in a display driven by a thin film transistor.


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