✦ LIBER ✦
Photo-stimulated CVD of SiNx for GaAs IC applications
✍ Scribed by Norbert Arnold; Lothar Schleicher
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 448 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0169-4332
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