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Photo-induced phenomena in sputtered GeO2 films

✍ Scribed by Nobuaki Terakado; Keiji Tanaka


Book ID
116668347
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
415 KB
Volume
351
Category
Article
ISSN
0022-3093

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## Photo-induced hydrophilic Oxygen flow ratio Self cleaning TiO 2 thin films were deposited by reactive radio frequency magnetron sputtering of Ti target at low working pressure (1 mTorr) and various O 2 and Ar flow ratios (R O2 = O 2 /(O 2 + Ar)). Properties of TiO 2 films were measured by field