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Photo-induced evolution of copper sheets from cluster molecules and its application to photolithographic copper patterning

✍ Scribed by N. Nishi; J. Nishijo; K. Judai; C. Okabe; O. Oishi


Book ID
111628302
Publisher
Springer
Year
2007
Tongue
English
Weight
284 KB
Volume
43
Category
Article
ISSN
1434-6060

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