Photo-acid generator having aromatic ketone structure for ArF chemically amplified resist

✍ Scribed by Katsumi Maeda; Kaichiro Nakano; Shigeyuki Iwasa; Etsuo Hasegawa

• Book ID: 114155379
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 468 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00440-9