✦ LIBER ✦
Phosphorous emitter etch back and bulk hydrogenation by means of an ECR-hydrogen plasma applied to form a selective emitter structure on mc-Si
✍ Scribed by L Debarge; J Boudaden; D Ballutaud; R Monna; J.C Muller
- Book ID
- 108472328
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 195 KB
- Volume
- 72
- Category
- Article
- ISSN
- 0927-0248
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