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Phonons in a-Si:H-based amorphous superlattices

โœ Scribed by P.V. Santos; H.J. Trodahl


Book ID
115987173
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
396 KB
Volume
114
Category
Article
ISSN
0022-3093

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The structural properties of superlattices composed by hydrogenated amorphous silicon/silicon carbide (a-Si:H/a-Si 1-x C x :H) and silicon/germanium (a-Si:H/a-Ge:H), deposited by the plasma-enhanced chemical vapor deposition (PECVD) technique, were analyzed by means of small-angle X-ray diffraction.

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