Synthesis of SiC nanofibers by microwave
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Rizk, S. ;Assouar, M. B. ;Belmahi, M. ;Le Brizoual, L. ;Bougdira, J.
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Article
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2007
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John Wiley and Sons
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English
โ 510 KB
## Abstract We report in this study, the growth of silicon carbide nanofibers on silicon substrates covered by Fe thin film catalyst using microwave plasma assisted chemical vapour deposition. The silicon source is the substrate itself. The growth morphology, microstructure, and defects on SiC nano