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Phase shifting common path interferometer using a liquid-crystal phase modulator

โœ Scribed by H. Kadono; M. Ogusu; S. Toyooka

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
1007 KB
Volume
110
Category
Article
ISSN
0030-4018

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A phase shifting technique using a Michelson interferometry system is presented and applied to surface contour measurement. Hyperbolic fringes are produced by the interference of two spherical wavefronts expanded from a beam expander. The fringe pattern is projected on an object surface and the defo