Phase-Selective Deposition and Microstructure Control in Iron Oxide Films Obtained by Single-Source CVD

✍ Scribed by S. Mathur; M. Veith; V. Sivakov; H. Shen; V. Huch; U. Hartmann; H.-B. Gao

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 544 KB
• Volume: 8
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/1521-3862(20021203)8:6<277::aid-cvde277>3.0.co;2-8