Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

✍ Scribed by Schulze, J; Schüngel, E; Donkó, Z; Luggenhölscher, D; Czarnetzki, U

• Book ID: 126013083
• Publisher: Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 610 KB
• Volume: 43
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/43/12/124016