Phase formation in silicon carbide, silicon, and glassy carbon after high-dose titanium implantation using a MEVVA ion source

✍ Scribed by J.K.N Lindner; K Baba; R Hatada; B Stritzker

• Book ID: 114170734
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 240 KB
• Volume: 148
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(98)00788-5