Phase formation in ion beam bombarded Al-Au multilayers using high-current 2.0 MeV4He+ ions
✍ Scribed by Markwitz, A.; Matz, W.
- Publisher
- John Wiley and Sons
- Year
- 1998
- Tongue
- English
- Weight
- 400 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
High-current ion beam bombardment (IBB) was performed to interdi †use Al-Au multilayers produced by evaporation on Ñat substrates of carbon, silicon and gold (typical thickness of each layer 150 nm, packages consist of 2 and 2.5 periods). During IBB with 2 MeV 4He' ions, the Al-Au interdi †usion was measured simultaneously with Rutherford backscattering (RBS). A complete mixing of the multilayers close to the surface is achieved within a few minutes and observed by variations in the Al-Au ratios. X-ray di †raction (XRD) was used to study the phase formation in detail. In as-deposited specimens only the reÑections of both metals are detected, whereas after IBB the main intermetallic phase is Small amounts of further Al-Au phases are observed additionally in depen-AlAu 2 . dence on the substrate type. It was deduced from complementary RBS and XRD analyses that intermixing in such multilayered systems is thermally dominated.