✦ LIBER ✦
Phase Formation in a Ta–Ni–N Thin Film during Its Electron-Beam Evaporation Deposition on a Heated Si(100) Substrate
✍ Scribed by A. G. Vasiliev; A. L. Vasiliev; R. A. Zakharov; A. A. Orlikovsky; I. A. Horin; M. Eindou
- Book ID
- 111551315
- Publisher
- Springer
- Year
- 2003
- Tongue
- English
- Weight
- 462 KB
- Volume
- 32
- Category
- Article
- ISSN
- 1063-7397
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