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Petri-net based scheduling strategy for semiconductor manufacturing processes

✍ Scribed by Yin-Hsuan Lee; Chuei-Tin Chang; David Shan-Hill Wong; Shi-Shang Jang

Book ID: 108091745
Publisher: Institution of Chemical Engineers
Year: 2011
Tongue: English
Weight: 865 KB
Volume: 89
Category: Article
ISSN: 0263-8762
DOI: 10.1016/j.cherd.2010.07.005

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