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Perspective on the Development of Microplasma Technology: The Role of Oxygen in Downstream Microwave Plasma

✍ Scribed by Y.-T. Wu; J.-D. Liao; C.-C. Weng; M.-C. Wang; J.-E. Chang; C.-H. Chen; M. Zharnikov

Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
664 KB
Volume
47
Category
Article
ISSN
0005-8025

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