Tribological properties of a-CNx coating
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Fei Zhou; Bin Yue; Qianzhi Wang; Xiaolei Wang; Adachi Koshi; Koji Kato
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Article
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2010
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John Wiley and Sons
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English
β 796 KB
Amorphous carbon nitride(a-CN x ) coatings were deposited on SiC disks by using ion beam assisted deposition, and their bonding structure and hardness were determined using X-ray photoelectron spectroscopy and nano-indenter, respectively. The contact angles on the surface of the a-CN x coatings were