✦ LIBER ✦
Performance optimization of the chemically amplified radiation resist RAY-PF
✍ Scribed by R.-U. Ballhorn; R. Dammel; H.H. David; Ch. Eckes; A. Fricke-Damm; K. Kreuer; G. Pawlowski; K. Przybilla
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 691 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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