Ordered, Nanostructured Tin-Based Oxides
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J. Fan; T. Wang; C. Yu; B. Tu; Z. Jiang; D. Zhao
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Article
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2004
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John Wiley and Sons
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English
⚖ 177 KB
👁 2 views
layer (Brewer Science XHRIC-16) was spun on the sample at 4000 rpm for 30 s and oven prebaked at 175 C for 3 min. Photoresist (PR; Shipley 510A) was spun on the ARC at 4000 rpm and oven prebaked for 3 min at 95 C. IL with 355 nm third-harmonic YAG laser beam was used to produce periodic nanopatterns