Performance of gas jet type Z-pinch plasma light source for EUV lithography

✍ Scribed by Inho Song; Yasunori Kobayashi; Toshiro Sakamoto; Smruti R. Mohanty; Masato Watanabe; Akitoshi Okino; Toru Kawamura; Koichi Yasuoka; Kazuhiko Horioka; Eiki Hotta

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 168 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.001