Performance of a planar magnetron sputtering apparatus with complex targets: Qing-Ming Chen et al, Vacuum, 38, 1988, 491–495

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 156 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90330-8