Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages

✍ Scribed by Heertjes, M.F.; Schuurbiers, X.G.P.; Nijmeijer, H.

• Book ID: 117918786
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 916 KB
• Volume: 56
• Category: Article
• ISSN: 1932-4529
• DOI: 10.1109/tie.2009.2012420