✦ LIBER ✦
Performance evaluation of a full-scale advanced phase isolation ditch process by using real-time control strategies
✍ Scribed by Kim, Hyosoo; Kim, Yejin; Kim, Minsoo; Piao, Wenhua; Gee, Jeasung; Kim, Changwon
- Book ID
- 121550127
- Publisher
- Springer US
- Year
- 2014
- Tongue
- English
- Weight
- 1001 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0256-1115
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