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Performance and reliability of low-temperature polysilicon TFT with a novel stack gate dielectric and stack optimization using PECVD nitrous oxide plasma

✍ Scribed by Kow-Ming Chang; Wen-Chih Yang; Chiu-Pao Tsai


Book ID
114617293
Publisher
IEEE
Year
2004
Tongue
English
Weight
479 KB
Volume
51
Category
Article
ISSN
0018-9383

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