Performance analysis of automated interbay material-handling and storage systems for large Wafer Fab

✍ Scribed by Cardarelli, Gino (author);Pelagagge, Pacifico Marcello (author);Granito, Agostino (author)

• Book ID: 108014332
• Publisher: Elsevier Ltd
• Year: 1996
• Tongue: English
• Weight: 728 KB
• Volume: 12
• Category: Article
• ISSN: 0736-5845
• DOI: 10.1016/0736-5845(96)00010-5