Perfluorooctane Sulfonyl Fluoride as an Initiator in Hot-Filament Chemical Vapor Deposition of Fluorocarbon Thin Films

✍ Scribed by Pryce Lewis, Hilton G.; Caulfield, Jeffrey A.; Gleason, Karen K.

• Book ID: 115448438
• Publisher: American Chemical Society
• Year: 2001
• Tongue: English
• Weight: 175 KB
• Volume: 17
• Category: Article
• ISSN: 0743-7463
• DOI: 10.1021/la0104929