✦ LIBER ✦
PECVD silicon carbide surface micromachining technology and selected MEMS applications
✍ Scribed by Vijayekumar Rajaraman; Lukasz S. Pakula; Heng Yang; Patrick J. French; Pasqualina M. Sarro
- Book ID
- 107667590
- Publisher
- Springer-Verlag
- Year
- 2010
- Weight
- 789 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0975-0770
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