## Abstract The use of optimal parameter estimation for the online regulation of final etch depth in an ion milling process is described. A modelโbased control system utilizes a 3โD surface evolution model to predict dynamic surface profiles and etch depth. A heterodyne laser interferometer is used
Peat Compressibility: a Parameter for Automatic Depth Control of Milling Machines
โ Scribed by C. von Ow; S.M. Ward; J. Lynch
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 179 KB
- Volume
- 63
- Category
- Article
- ISSN
- 0021-8634
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