✦ LIBER ✦
Patterning of thin poly(N-vinyl pyrrolidone) films on silicon substrates by electron beam lithography
✍ Scribed by Sina Burkert; Thomas Schmidt; Uwe Gohs; Ingolf Mönch; Karl-Friedrich Arndt
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 233 KB
- Volume
- 106
- Category
- Article
- ISSN
- 0021-8995
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