Patterning of polyimide precursor Langmuir-Blodgett films and their application as deep UV resists

✍ Scribed by Masakazu Uekita; Hiroshi Awaji; Makoto Murata; Satoshi Mizunuma

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 927 KB
• Volume: 205
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(91)90480-l