Patterning of organic layers using negative and positive working top-CARL process

✍ Scribed by R. Leuschner; H. Ahne; U. Marquardt; U. Nickel; E. Schmidt; M. Sebald; R. Sezi

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 418 KB
• Volume: 21
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(93)90067-f