Patterning of Nanoporous Anodic Aluminum Oxide Arrays by Using Sol−Gel Processing, Photolithography, and Plasma Etching

✍ Scribed by Brevnov, Dmitri A.; Barela, Marcos; Piyasena, Menake E.; López, Gabriel P.; Atanassov, Plamen B.

• Book ID: 120266494
• Publisher: American Chemical Society
• Year: 2004
• Tongue: English
• Weight: 149 KB
• Volume: 16
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm034553v