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Patterned sputter deposited SmCo-films for MEMS applications

✍ Scribed by T. Budde; H.H. Gatzen

Book ID: 114225540
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 120 KB
Volume: 242-245
Category: Article
ISSN: 0304-8853
DOI: 10.1016/s0304-8853(01)01304-x

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