Patterned n+ implant into InP substrate for HBT subcollector

✍ Scribed by Chen, M.Y.; Sokolich, M.; Chow, D.H.; Bui, S.; Royter, Y.; Hitko, D.; Thomas, S., III; Fields, C.H.; Rajavel, R.D.; Biqiang Shi

• Book ID: 114617570
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 600 KB
• Volume: 51
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2004.835024