Patterned Microstructures of Porous Silicon by Dry-Removal Soft Lithography

✍ Scribed by D.J. Sirbuly; G.M. Lowman; B. Scott; G.D. Stucky; S.K. Buratto

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 159 KB
• Volume: 15
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200390031