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Pattern definition through guided self-assembly in thermal nanoimprint

✍ Scribed by Andre Mayer; Nicolas Bogdanski; Saskia Möllenbeck; Hella-Christin Scheer


Book ID
104052608
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
253 KB
Volume
87
Category
Article
ISSN
0167-9317

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We report a comparative study on selective epitaxy of nanostructures with different geometrical shapes. GaAs pyramids were grown by molecular beam epitaxy into circular holes, L-shaped holes, and cross-shaped holes, patterned using nanoimprint lithography. These GaAs nanostructures were used for gui