Pattern buried oxide in silicon-on-insulator-based fabrication of floppy single-crystal-silicon cantilevers

✍ Scribed by Yong Liu; Gang Zhao; Baoqing Li; Li Wen; Jiaru Chu

• Book ID: 114461548
• Publisher: The Institution of Engineering and Technology
• Year: 2011
• Tongue: English
• Weight: 257 KB
• Volume: 6
• Category: Article
• ISSN: 1750-0443
• DOI: 10.1049/mnl.2011.0029