Passive single chip wireless microwave p
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Amr Ibrahim; D.R.S. Cumming
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Article
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2011
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Elsevier Science
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English
β 981 KB
A novel micromachined passive wireless pressure sensor is presented. The device consists of a tuned circuit operating at 10 GHz fabricated on to a SiO 2 membrane, supported on a silicon wafer. A pressure difference across the membrane causes it to deflect so that an antenna circuit detunes. The circ