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Passive charge modulation for a wireless pressure sensor

✍ Scribed by Theurer, C.B.; Li Zhang, ; Kazmer, D.O.; Gao, R.X.; Jackson, R.W.


Book ID
125530505
Publisher
IEEE
Year
2006
Tongue
English
Weight
598 KB
Volume
6
Category
Article
ISSN
1530-437X

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A novel micromachined passive wireless pressure sensor is presented. The device consists of a tuned circuit operating at 10 GHz fabricated on to a SiO 2 membrane, supported on a silicon wafer. A pressure difference across the membrane causes it to deflect so that an antenna circuit detunes. The circ