Particle energy loss spectroscopy and SEM studies of topography development in thin aluminium films implanted with high doses of helium

✍ Scribed by KM Barfoot; RP Webb; SE Donnelly

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 804 KB
• Volume: 34
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(84)90158-1