✦ LIBER ✦
Particle emission from chemically enhanced electron-beam-induced etching of Si: An approach for zero-energy secondary-ion mass spectrometry
✍ Scribed by Vanhove, N.; Lievens, P.; Vandervorst, W.
- Book ID
- 126184989
- Publisher
- The American Physical Society
- Year
- 2009
- Tongue
- English
- Weight
- 235 KB
- Volume
- 79
- Category
- Article
- ISSN
- 1098-0121
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