✦ LIBER ✦
Particle-beam fabrication and ‘in situ’ processing of integrated circuits : Andrew J. Steckl. Proc. IEEE74 (12), 1753 (1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 117 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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