✦ LIBER ✦
Partially carboxymethylated novolaks for photoresist systems: New photoresists for development under mildly alkaline conditions
✍ Scribed by U. Westerwelle; G. Bähr; G. Grützner; F. Reuther
- Book ID
- 114155804
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 282 KB
- Volume
- 41-42
- Category
- Article
- ISSN
- 0167-9317
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