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Partial oxygen pressure effects on the morphology of Y-Ba-Cu-O thin films in laser deposition process

✍ Scribed by Hase, Takashi; Izumi, Hirohiko; Ohata, Katsumi; Suzuki, Katsumi; Morishita, Tadataka; Tanaka, Shoji


Book ID
121836302
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
552 KB
Volume
68
Category
Article
ISSN
0021-8979

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The composition of pulsed-ultraviolet-laser-deposited Y-Ba-Cu-O films was examined as a function of position across the substrate, laser fiuence, laser spot size, substrate temperature, target conditioning, oxygen pressure and target-substrate distance. Laser fluence, laser spot size, and substrate